Ekukhiqizweni kwe-wafer ye-semiconductor, inqubo ye-lithography iyisinyathelo esibucayi, esiqhutshwa ngokunemba esinquma isivuno se-chip. Njenge "isisekelo sokuvezwa nokuthwebula izithombe" enkambisweni yokwenziwa kwe-wafer, i-lithography ihlanganisa wonke umsebenzi - kufaka phakathi i-spin coating, ukuvezwa, ukuthuthukiswa, ukuqopha, kanye nokuhlanza okumanzi - futhi ibeka izidingo eziqinile kakhulu ekuhlanzekeni kwemvelo, ukulawulwa kokungcola, ukuvikelwa kwe-electrostatic, kanye nokumelana namakhemikhali. Izinhlayiya zothuli ezingeni le-micron, ukufuduka kwe-trace ion, kanye nokukhishwa kwe-electrostatic okufushane konke kungabangela ngqo amaphutha e-photoresist, ukungalungi kwephethini, i-oxidation ye-wafer, kanye nezifunda ezincane ezimfushane kumasekethe, okuholela ekususweni kwama-wafer aphelele futhi kuholele ekulahlekelweni okukhulu komkhiqizo. Ama-FAB amaningi alwela ukuthuthukisa isivuno sezinqubo zawo ze-photolithography. Ngisho noma imishini, izinqubo, kanye nemingcele yemvelo konke kuhlelekile, imbobo ivame ukuba sezinto ezisetshenziswayo zokuvikela izandla ezibonakala zingabalulekile. Amagilavu ajwayelekile e-Class 1,000 noma e-industrial-grade cleanroom awafaneleki nhlobo amazinga aphezulu kakhulu enqubo ye-photolithography.
Kungani Ukusetshenziswa Kwamagilavu Avamile Okuhlanza Kuvinjelwe Ngokuqinile Enqubweni Ye-Lithography?
Izinsalela zempuphu zibangela ukungcola kwe-photoresist
Ama-ion amaningi e-sulfur ne-chloride agqwala izifunda eziku-wafers
Ugesi oqinile uphume ngaphandle kokulawula, okwabangela ukuphazamiseka kwe-wafer ye-photolithography enembile
Ukuqhekeka nokuchitheka, okuholela ekuphazamisekeni kwezinto zangaphandle enqubweni yokukhiqiza
Amagilavu e-Nitrile angenawo uphuzo e-LjieClean Class 100
I-Suzhou Leader igxile emkhakheni wokukhiqiza ama-wafer e-semiconductor futhi ibhekana nezinkinga enqubweni ye-lithography, sithuthukise amagilavu e-nitrile akhethekile e-Class 100 angenampuphu, angenagesi aphansi ahlangabezana kahle nezidingo zokukhiqiza zenqubo yonke ye-wafer lithography, okwenza abe yizinto ezisetshenziswayo zokuvikela ezikhethwayo zezinkampani eziningi zokupakisha nokuhlola ama-wafer.
1. Inqubo Yokungabi Nampuphu Esekelwe ku-Dichloride: Akukho Ukungcola Kwempuphu Enqubweni Ye-Photolithography
Isebenzisa inqubo yokuhlanza i-chlorination ethile ye-semiconductor, le ndlela ayidingi ukungezwa kwezithasiselo ezisizayo njenge-talc, i-cornstarch, noma uwoyela we-silicone kuyo yonke inqubo. Iqinisekisa ukusetshenziswa okubushelelezi ngenqubo ngokwayo, isusa izinhlayiya zempuphu kanye nezinsalela zamafutha e-silicone ezingcolisa i-photoresist emthonjeni, ngaleyo ndlela zixazulule ngokuphelele amaphutha ezinhlayiya zangaphandle enqubweni ye-photolithography.
2 Ukuhlanza ngamanzi ahlanzekile kakhulu ngezigaba eziningi kufeza inani eliphansi lesibabule, i-chlorine ephansi, kanye ne-ion ephansi
Ngemijikelezo eminingi yokuhlanza ngokujulile ngamanzi ahlanzekile kakhulu, izithasiselo zezinto zokusetshenziswa kanye nezinsalela zangaphezulu ziyasuswa. Okuqukethwe kwe-sulfur, chlorine, kanye nama-ion ensimbi ancibilikayo kulawulwa ngokuqinile, okuholela ku-NVR ephansi (i-non-volatile residue). Lokhu kuvimbela i-wafer oxidation, ukugqwala kokumboza, kanye nokukhubazeka kokuqopha, okwenza amagilavu avumelane ngokugcwele nezinqubo ze-lithography ezidingakalayo zama-wafer angu-8 no-12 intshi.
Ukuvikelwa kwe-ESD Okuguquliwe Okungaphakathi Kwesikhunta Oku-3 Ukuvikela Ama-Wafers Azwela Ngogesi
Ngokungafani namagilavu alwa ne-static atholakala kwezentengiselwano anezimbozo zesikhashana zokufutha, i-Gonars isebenzisa ubuchwepheshe bokuguqulwa kwe-anti-static obungaphakathi kwesikhunta ezintweni eziyisisekelo ze-nitrile. Lokhu kuqinisekisa ukumelana okuzinzile nokufanayo kobuso, kuqeda ugesi oqinile njalo kuyo yonke inqubo ukuvimbela ukwakheka kwe-static okungadala ukuwohloka kwe-photoresist kanye nomonakalo kumasekethe e-wafer aqondile. Ifanele izinyathelo ze-lithography eziyinhloko njengokuvezwa kanye nokuthuthukiswa.
I-4Flexible and Snug Fit, Ifanelekela Ukusebenza Okunembile Kwezinga Le-Micron
Izinto zeglavu ziyaguquguquka futhi zihambisana nokwakheka kwesandla. Njengoba inomklamo ongasheleli othambile ezinzwaneni, ilula futhi ayikhulu, okwenza ifaneleke kakhulu ekusebenzeni ngokunemba njengokuphathwa kwe-photolithography wafer, ukulungisa amaphutha emishini, kanye nokuhlolwa ngokunemba. Inikeza ukunyakaza okungenamkhawulo futhi ivimbela ukushelela, inciphisa ngempumelelo umonakalo obangelwa ukugoba ngengozi ngesikhathi sokusebenza ngesandla. Ngaphezu kwalokho, imelana nezinyibilikisi ze-photolithography kanye nama-asidi athambile nama-alkali, futhi ihlala isikhathi eside ngaphandle kokuguga noma ukudabuka ngisho nangesikhathi sokusetshenziswa isikhathi eside.
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✅ Ukupakisha okuvalwe nge-vacuum okunezingqimba ezimbili kuqeda ukungcola kwesibili
Imikhiqizo eqediwe ipakishwa kuyo yonke inqubo egumbini lokuhlanza le-Class 100 kusetshenziswa iphakheji evalwe nge-vacuum enezingqimba ezimbili, ehlukanisa ngokuphelele uthuli nomswakama ngesikhathi sokugcina nokuthuthwa. Akukho ukungcola kwesibili lapho kuvulwa iphakheji, okuvumela ukuthi isetshenziswe ngokushesha ezindaweni zokuhlanza ze-Class 100 lithography.
Isikhathi sokuthunyelwe: Julayi-23-2026